✦ LIBER ✦

Stresses in sputtered tungsten thin films

✍ Scribed by A.M. Haghiri-Gosnet; F.R. Ladan; C. Mayeux; H. Launois

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Mechanical stresses in D.C. reactively s

✍ V. Orlinov; G. Sarov 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 607 KB

Properties of sequentially sputtered tun

✍ W. Pletschen; N. Herres; M. Maier; M. Seelmann-Eggebert; J. Wagner; A. Voigt; H. 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 760 KB

Optimization of the stresses in tungsten

✍ A.M. Gosnet; F.R. Ladan; M.C. Joncour; Y. Gao 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 237 KB

Atomic defects and stresses in r.f.-sput

✍ A.L. Shabalov; M.S. Feldman 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 401 KB

Stresses, microstructure and resistivity

✍ M.C. Hugon; F. Varniere; B. Agius; M. Froment; C. Arena; J. Bessot 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 451 KB

Stresses in sputter-deposited nickel and

✍ P.V. Plunkett; R.M. Johnson; C.D. Wiseman 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 437 KB