✦ LIBER ✦

Optimization of the stresses in tungsten sputtered films, study of their stability

✍ Scribed by A.M. Gosnet; F.R. Ladan; M.C. Joncour; Y. Gao

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The origin of stresses in magnetron-sput

✍ R. Daniel; K.J. Martinschitz; J. Keckes; C. Mitterer 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 692 KB

Influence of Annealing on the Residual S

✍ M. Härting; T.P. Ntsoane; R. Bucher 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 81 KB 👁 2 views

Stress in Sputtered Films of Near-Equiat

✍ Grummon, D.S. ;Zhang, Jinping 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 442 KB 👁 2 views

Note on the origin of intrinsic stresses

✍ F.M. D'Heurle; J.M.E. Harper 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 804 KB

The origin of internal stress in low-vol

📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 343 KB

In situ measurement of the surface stres

✍ Seung Hyun Lee; Joong Keun Park 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 323 KB