Influence of Annealing on the Residual Stress in Sputter-Deposited Platinum Films

✍ Scribed by M. Härting; T.P. Ntsoane; R. Bucher

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 81 KB
• Volume: 4
• Category: Article
• ISSN: 1438-1656
• DOI: 10.1002/1527-2648(20020806)4:8<607::aid-adem607>3.0.co;2-e