Stress in Sputtered Films of Near-Equiatomic TiNiX on (100) Si: Intrinsic and Extrinsic Stresses and Their Modification by Thermally Activated Mechanisms

✍ Scribed by Grummon, D.S. ;Zhang, Jinping

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 442 KB
• Volume: 186
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200107)186:1<17::aid-pssa17>3.0.co;2-t