✦ LIBER ✦
The origin of internal stress in low-voltage sputtered tungsten films: R C Sun et al, J Appl Phys, 46 (1), 1975, 112–117
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 343 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
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