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Stress induced leakage currents in thin oxides

โœ Scribed by D.J. DiMaria


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
339 KB
Volume
28
Category
Article
ISSN
0167-9317

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Stress induced leakage current in ultra-
โœ A. Scarpa; G. Ghibaudo; G. Ghidini; G. Pananakakis; A. Paccagnella ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 216 KB

Constant current stress induced leakage currents are studied in very thin oxide devices, for both stress polarities. This current has been investigated for both positive and negative gate voltage measurements. Stress induced leakage current (SILC) physical nature has been studied and an interpretati