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Elimination of stress induced oxide leakage in textured tunneling oxide

โœ Scribed by Reza Rofan; Jack Churchill; Chenming Hu; Yupin Fong

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
159 KB
Volume
35
Category
Article
ISSN
0038-1101

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๐Ÿ“œ SIMILAR VOLUMES

Stress induced leakage current in ultra-
Stress induced leakage current in ultra-thin gate oxides after constant current stress
โœ A. Scarpa; G. Ghibaudo; G. Ghidini; G. Pananakakis; A. Paccagnella ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 216 KB

Constant current stress induced leakage currents are studied in very thin oxide devices, for both stress polarities. This current has been investigated for both positive and negative gate voltage measurements. Stress induced leakage current (SILC) physical nature has been studied and an interpretati