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Stress Control in GaN Grown on 6H-SiC by Metalorganic Chemical Vapor Deposition

✍ Scribed by Chen, Yao; Jiang, Yang; Xu, Pei-Qiang; Ma, Zi-Guang; Wang, Xiao-Li; Wang, Lu; Jia, Hai-Qiang; Chen, Hong

Book ID: 111918213
Publisher: Institute of Physics
Year: 2011
Tongue: English
Weight: 542 KB
Volume: 28
Category: Article
ISSN: 0256-307X
DOI: 10.1088/0256-307x/28/4/048101

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