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Origin of cracks in GaN/AlGaN DH structure grown on 6H-SiC by metalorganic vapor phase epitaxy

✍ Scribed by Yamamoto, J; Kurimoto, M; Shibata, M; Honda, T; Kawanishi, H


Book ID
108342689
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
118 KB
Volume
189-190
Category
Article
ISSN
0022-0248

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