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Stress and microstructure evolution in thick sputtered films

โœ Scribed by Andrew J. Detor; Andrea M. Hodge; Eric Chason; Yinmin Wang; Hongwei Xu; Mark Conyers; Abbas Nikroo; Alex Hamza


Book ID
103998762
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
803 KB
Volume
57
Category
Article
ISSN
1359-6454

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