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Crystallization and microstructural evolution of cordierite-based thick film dielectrics

โœ Scribed by Y.S. Cho; D.T. Hoelzer; W.A. Schulze; V.R.W. Amarakoon


Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
739 KB
Volume
46
Category
Article
ISSN
1359-6454

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Lead zirconate titanate (PZT) thick films have been successfully grown on Pt/Ti-coated (1 0 0) Si substrates by a novel aerosol plasma deposition (APD) method at room temperature. The dielectric constant (K) and loss tangent (tan ฮด) of the as-deposited film measured at 100 kHz are 223 and 0.034, res