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Effect of annealing on the crystal structure and dielectric properties of Ba0.6Sr0.4TiO3 thick films

✍ Scribed by L.Z. Cao; Q.D. Meng; W.Y. Fu; S.F. Wang; M. Lei; B.L. Cheng; Y.L. Zhou; Z.H. Chen


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
524 KB
Volume
393
Category
Article
ISSN
0921-4526

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Mechanical properties and surface characterizations of Ba 0.7 Sr 0.3 TiO 3 thin films deposited on silicon substrate by metalorganic decomposition (MOD) method under different annealing temperatures were investigated. Hardness, Young's modulus and the contact stress-strain of the films were achieved