Effect of annealing on the structural an
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Te-Hua Fang; Win-Jin Chang; Chao-Ming Lin; Liang-Wen Ji; Yee-Shin Chang; Yu-Jen
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Article
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2006
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Elsevier Science
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English
β 312 KB
Mechanical properties and surface characterizations of Ba 0.7 Sr 0.3 TiO 3 thin films deposited on silicon substrate by metalorganic decomposition (MOD) method under different annealing temperatures were investigated. Hardness, Young's modulus and the contact stress-strain of the films were achieved