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Microstructure and mechanical properties of sputtered platinum films

✍ Scribed by H. Tokura; B. Window; D. Neely; M. Swain

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
430 KB
Volume
253
Category
Article
ISSN
0040-6090

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## Abstract Amorphous carbon films with additions of silicon were deposited by non‐reactive magnetron sputtering on WC‐Co hard metal and on silicon substrates. The targets were hot‐pressed, homogenous mixtures of graphite and silicon carbide powder. Additional argon ion bombardment of the growing f