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Strain distribution in As+ and Sb+ ion implanted and annealed 〈100〉 Si

✍ Scribed by Z.E. Horvath; G. Peto; Eva Zsoldos; J. Gyulai


Book ID
113284724
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
222 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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