✦ LIBER ✦

Anomalous redistributions of As and Sb atoms in As-implanted Sb-doped Si and Sb-implanted As-doped Si during annealing

✍ Scribed by Katsuhiro Yokota; Hiroshi Furuta; Shinji Ishihara; Itsuro Kimura

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Strain distribution in As+ and Sb+ ion i

✍ Z.E. Horvath; G. Peto; Eva Zsoldos; J. Gyulai 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 222 KB

Implantation doping of germanium with Sb

✍ A. Axmann; M. Schulz; C. R. Fritzsche 📂 Article 📅 1977 🏛 Springer 🌐 English ⚖ 381 KB

Damage accumulation and dopant migration

✍ M. Werner; J.A. van den Berg; D.G. Armour; W. Vandervorst; E.H.J. Collart; R.D. 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 352 KB

Effect of excess vacancy concentration o

✍ Dalponte, M; Adam, M C; Boudinov, H I; Goncharova, L V; Feng, T; Garfunkel, E; G 📂 Article 📅 2009 🏛 Institute of Physics 🌐 English ⚖ 503 KB

Radiation defects and electrical propert

✍ O.J. Araika; A.R. Chelyadinskii; V.A. Dravin; Yu.R. Suprun-Belevich; V.P. Tolsti 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 506 KB

Vacancy effects in transient diffusion o

✍ Lulli, G.; Bianconi, M.; Solmi, S.; Napolitani, E.; Carnera, A. 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 343 KB