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Strain and strain-release engineering at epitaxial SiGe islands on Si(0 0 1) for microelectronic applications

✍ Scribed by G. Vastola; A. Marzegalli; F. Montalenti; Leo Miglio


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
742 KB
Volume
159-160
Category
Article
ISSN
0921-5107

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