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Stochastic heating in asymmetric capacitively coupled RF discharges

✍ Scribed by Schulze, J; Heil, B G; Luggenhölscher, D; Brinkmann, R P; Czarnetzki, U

Book ID
124095303
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
852 KB
Volume
41
Category
Article
ISSN
0022-3727

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Measured breakdown characteristics of capacitively coupled RF discharges are compared with numerical simulations performed under different boundary conditions at the electrode. When a pair of glass-covered aluminum disks are used in the breakdown measurement of N 2 and Ar gases at RF frequency of 13