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Standard and self-sustained magnetron sputtering deposited Cu films investigated by means of AFM and XRD

✍ Scribed by A. Wiatrowski; W.M. Posadowski; G. Jóźwiak; J. Serafińczuk; R. Szeloch; T. Gotszalk


Book ID
108210935
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
810 KB
Volume
51
Category
Article
ISSN
0026-2714

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