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Investigation of conductive and transparent ITO/Ni/ITO multilayer films deposited by a magnetron sputter process

โœ Scribed by J.C. Kim; C.H. Shin; C.W. Jeong; Y.J. Kwon; J.H. Park; Daeil Kim


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
788 KB
Volume
268
Category
Article
ISSN
0168-583X

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Transparent conducting indium tin oxide (ITO) thin films were prepared on glass substrates by a magnetron sputter type negative ion source which requires cesium (Cs) vapor injection for surface negative ionization on the ITO target surface. Although the film was prepared at 70 ยฐC, it attained high o