𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The role of oxygen and hydrogen partial pressures on structural and optical properties of ITO films deposited by reactive rf-magnetron sputtering

✍ Scribed by Rajesh Das; Koel Adhikary; Swati Ray

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
756 KB
Volume
253
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Thermal, structural and optical properti
Thermal, structural and optical properties of NiOx thin films deposited by reactive dc-magnetron sputtering
✍ Ying Zhou; Donghong Gu; Yongyou Geng; Fuxi Gan πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 330 KB

The NiO x thin films were deposited by reactive dc-magnetron sputtering from a nickel metal target in Ar + O 2 with the relative O 2 content 5%. The as-deposited NiO x thin films could represent a two-component system comprising crystalline NiO particles dispersed in an amorphous Ni 2 O 3 . Decompos

Structural and optical properties of N-d
Structural and optical properties of N-doped Ξ²-Ga2O3 films deposited by RF magnetron sputtering
✍ Yijun Zhang; Jinliang Yan; Qingshan Li; Chong Qu; Liying Zhang; Ting Li πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 930 KB

The N-doped b-Ga 2 O 3 films were grown on Si and quartz substrates by RF magnetron sputtering in different ammonia partial pressure ratios (from 0% to 30%). The influence of ammonia partial pressure ratios and annealing treatment on the optical and structural properties were studied. The microstruc