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An extreme change in structural and optical properties of indium oxynitride deposited by reactive gas-timing RF magnetron sputtering

✍ Scribed by A. Sungthong; S. Porntheeraphat; A. Poyai; J. Nukeaw

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 980 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.04.038

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