✦ LIBER ✦
Deposition of thick films of oxygen-free high conductivity copper by unbalanced d.c. magnetron sputtering: self-biased and biased conditions
✍ Scribed by D. Monagham; R.D. Arnell
- Book ID
- 107930129
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 596 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0257-8972
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