✦ LIBER ✦

Stability of microelectromechanical devices for electrical metrology

✍ Scribed by Kyynarainen, J.; Oja, A.S.; Seppa, H.

Book ID: 114545067
Publisher: IEEE
Year: 2001
Tongue: English
Weight: 87 KB
Volume: 50
Category: Article
ISSN: 0018-9456
DOI: 10.1109/19.982934

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