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Atomic-layer deposition of wear-resistant coatings for microelectromechanical devices

✍ Scribed by Mayer, T. M.; Elam, J. W.; George, S. M.; Kotula, P. G.; Goeke, R. S.

Book ID: 120187030
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 535 KB
Volume: 82
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1570926

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