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Superhard self-lubricating AlMgB[sub 14] films for microelectromechanical devices

✍ Scribed by Tian, Y.; Bastawros, A. F.; Lo, C. C. H.; Constant, A. P.; Russell, A. M.; Cook, B. A.


Book ID
121689372
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
409 KB
Volume
83
Category
Article
ISSN
0003-6951

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