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Realisation of radio frequency microelectromechanical devices for multiband, tunable circuit applications

✍ Scribed by Heves, E.; Gurbuz, Y.


Book ID
114444387
Publisher
The Institution of Engineering and Technology
Year
2011
Tongue
English
Weight
540 KB
Volume
5
Category
Article
ISSN
1751-8725

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## Abstract Spiral inductors with various turn numbers fabricated with the use of leading‐edge 0.13‐μm mixed‐signal/RF CMOS technology with 193‐nm lithography and Cu/low‐k interconnect are described in this article. It is shown that quality (Q) factor decreased and increased with increasing tempera