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Stability of amorphous IrTa diffusion barriers between Cu and Si

✍ Scribed by R. de Reus; R.J.I.M. Koper; H. Zeijlemaker; F.W. Saris

Book ID: 119124428
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 490 KB
Volume: 9
Category: Article
ISSN: 0167-577X
DOI: 10.1016/0167-577x(90)90095-4

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