✦ LIBER ✦

Evaluation of amorphous (Mo, Ta, W)SiN diffusion barriers for 〈Si〉|Cu metallizations

✍ Scribed by J.S. Reid; E. Kolawa; R.P. Ruiz; M.-A. Nicolet

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Amorphous Ta-Si-N diffusion barriers in

✍ E. Kolawa; P.J. Pokela; J.S. Reid; J.S. Chen; M.-A. Nicolet 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 364 KB

W-B-N diffusion barriers for Si/Cu metal

✍ J.S. Reid; R.Y. Liu; Paul Martin Smith; R.P. Ruiz; M.-A. Nicolet 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 636 KB