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WNx diffusion barriers between Si and Cu

✍ Scribed by Masaki Uekubo; Takeo Oku; Kazushi Nii; Masanori Murakami; Katsumi Takahiro; Sadae Yamaguchi; Tadashi Nakano; Tomohiro Ohta

No coin nor oath required. For personal study only.

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Diffusion barrier property of TaN betwee

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