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Interfacial reactions between Al and RuO2, MoOx and WNx diffusion barriers on Si

✍ Scribed by S. E. Hörnström; A. Charai; O. Thomas; L. Krusin-Elbaum; P. M. Fryer; J. M. E. Harper; S. Gong; A. Robertsson


Book ID
104592257
Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
595 KB
Volume
14
Category
Article
ISSN
0142-2421

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