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Sputtering of silicon and gallium arsenide with medium energy intense ion beams of argon and xenon

✍ Scribed by K. Pearmain; B.A. Unvala

Book ID: 118367589
Publisher: Elsevier Science
Year: 1975
Tongue: English
Weight: 490 KB
Volume: 25
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(75)91057-x

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