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Energy and fluence dependence of the sputtering yield of silicon bombarded with argon and xenon

✍ Scribed by Blank, P.; Wittmaack, K.

Book ID: 121840856
Publisher: American Institute of Physics
Year: 1979
Tongue: English
Weight: 909 KB
Volume: 50
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.326140

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