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Energy dependence of the sputtering yield of silicon bombarded with neon, argon, krypton, and xenon ions

✍ Scribed by Zalm, P. C.

Book ID: 126063601
Publisher: American Institute of Physics
Year: 1983
Tongue: English
Weight: 707 KB
Volume: 54
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.332340

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