✦ LIBER ✦
1289. Sputtering of silicon and gallium arsenide with medium energy intense ion beams of argon and xenon: K Pearmain and B A Unvala, Vacuum, 25 (1), 1975, 3–7
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 215 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.