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Sputtering by particle bombardment. I. Physical sputtering of single element solids. Topics in Applied Physics. Vol. 47edited by R. Behrisch

✍ Scribed by Betz, G.


Book ID
114523128
Publisher
International Union of Crystallography
Year
1982
Weight
140 KB
Volume
38
Category
Article
ISSN
0567-7394

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