Sputtering by particle bombardment III: Characteristics of sputtered particles, technical applications: Edited by R Behrisch and K Wittmaack, with contribution by R Behrisch, W Hauffe, W O Hofer, N Laegreid, E D McClanaham, B U R Sundquist, K Wittmaack and M L Yu (Topics in Applied Physics, Vol 64), Springer, Berlin, 1991. ISBN 3-540-53428-8, XV + 410 pp. DM 120.

✍ Scribed by W Steckelmacher

• Book ID: 103471581
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 84 KB
• Volume: 43
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(92)90152-m