Sputtering by particle bombardment. I. Physical sputtering of single-element solids. Hg. von R. Behrisch. Topics in applied physics, vol. 47. Berlin/Heidelberg/New York: Springer-Verlag 1981. X, 281 S., geb. DM 85,–.

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• Publisher: John Wiley and Sons
• Year: 1983
• Tongue: English
• Weight: 161 KB
• Volume: 34
• Category: Article
• ISSN: 0323-7648
• DOI: 10.1002/actp.1983.010340617