Sputtering by particle bombardment, vol. I: Physical sputtering of single-elements solids: Edited by R. Behrisch With Contributions by H.H. Andersen, H.L. Bay, R. Behrisch, M.T. Robinson, H.E. Roosendaal, and P. Sigmund (Springer-Verlag Berlin, Heidelberg, New York, 1981), 281 pages, 117 figures

✍ Scribed by Dr.O. Meyer

• Book ID: 107809490
• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 86 KB
• Volume: 107
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(82)90441-x