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Sputtering and transport processes in a new laboratory-constructed sputtering atomizer

โœ Scribed by J.C. Hutton; C.L. Chakrabarti; P.C. Bertels; M.H. Back

Book ID
113374636
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
907 KB
Volume
46
Category
Article
ISSN
0584-8547

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An algorithm for Monte Carlo simulation of sputtered atom transport during ion-plasma sputtering was developed. The experimentally determined initial energy distribution of sputtered atoms, the influence of the background gas mixture and the real equipment geometry of the magnetron sputtering system