Numerical estimates for energy of sputtered target atoms and reflected Ar neutrals in sputter processes

✍ Scribed by Junqing Lu; Chan Gyu Lee

• Book ID: 113940932
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 541 KB
• Volume: 86
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2011.10.018