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Measurement of neutral Ti atoms from TiC and Ti targets sputtered by low-energy H+ and Ar+ ions using laser-induced fluorescence

✍ Scribed by R. Yamada; H.L. Bay; B. Schweer


Book ID
107809805
Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
694 KB
Volume
128-129
Category
Article
ISSN
0022-3115

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