Determination of excited sputtered atoms kinetic energy as a contribution to the understanding of the excitation phenomenon in the sputtering process

✍ Scribed by O. Auciello

• Publisher: Elsevier Science
• Year: 1982
• Weight: 390 KB
• Volume: 194
• Category: Article
• ISSN: 0167-5087
• DOI: 10.1016/0029-554x(82)90579-1