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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Submicron displacements measurement by measuring autocorrelation of the transmission function of a grating

✍ Scribed by Madanipour, K.; Tavassoly, M. T.; Lehmann, Peter H.; Osten, Wolfgang; Gastinger, Kay

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