SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - The road towards accurate optical width measurements at the industrial level

✍ Scribed by Bodermann, Bernd; Lehmann, Peter H.; Osten, Wolfgang; Köning, Rainer; Bergmann, Detlef; Albertazzi, Armando; Buhr, Egbert; Hässler-Grohne, Wolfgang; Flügge, Jens; Bosse, Harald

• Book ID: 121382429
• Publisher: SPIE
• Year: 2013
• Weight: 716 KB
• Volume: 8788
• Category: Article
• DOI: 10.1117/12.2021888