SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Optical Manufacturing and Testing X - Sparse microdefect evaluation system for large fine optical surfaces based on dark-field microscopic scattering imaging

✍ Scribed by Yang, Yongying; Wang, Shitong; Chen, Xiaoyu; Li, Lu; Cao, Pin; Yan, Lu; Cheng, Zhongtao; Liu, Dong; Fähnle, Oliver W.; Williamson, Ray; Kim, Dae Wook

• Book ID: 121488498
• Publisher: SPIE
• Year: 2013
• Weight: 733 KB
• Volume: 8838
• Category: Article
• DOI: 10.1117/12.2023438