SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Optical Manufacturing and Testing X - High precision surface metrology of x-ray optics with an interferometric microscope

✍ Scribed by Lacey, Ian; Artemiev, Nikolay A.; McKinney, Wayne R.; Merthe, Daniel J.; Yashchuk, Valeriy V.; Fähnle, Oliver W.; Williamson, Ray; Kim, Dae Wook

• Book ID: 121488507
• Publisher: SPIE
• Year: 2013
• Weight: 587 KB
• Volume: 8838
• Category: Article
• DOI: 10.1117/12.2024416