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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 25 August 2013)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII - Controlling high-throughput manufacturing at the nano-scale

✍ Scribed by Cooper, Khershed P.; Postek, Michael T.; Orji, Ndubuisi George

Book ID: 121458106
Publisher: SPIE
Year: 2013
Weight: 204 KB
Volume: 8819
Category: Article
DOI: 10.1117/12.2026714

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