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SPIE Proceedings [SPIE Seventh International Conference on Thin Film Physics and Applications - Shanghai, China (Friday 24 September 2010)] Seventh International Conference on Thin Film Physics and Applications - Comparative investigation of infrared optical absorption properties of silicon oxide, oxynitride and nitride films

✍ Scribed by Zhou, Shun; Liu, Weiguo; Cai, Changlong; Liu, Huan; Chu, Junhao; Wang, Zhanshan

Book ID: 120553952
Publisher: SPIE
Year: 2010
Weight: 939 KB
Volume: 7995
Category: Article
DOI: 10.1117/12.888194

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