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SPIE Proceedings [SPIE Sixth International Conference on Thin Film Physics and Applications - Shanghai, China (Tuesday 25 September 2007)] Sixth International Conference on Thin Film Physics and Applications - Investigation on the mechanical properties of P-doped nc-Si:H films

✍ Scribed by Wang, Li; Wang, Jinliang; Lin, Jinzhao; Zhou, Bo; Peng, Hongyong; Shen, Wenzhong; Chu, Junhao

Book ID: 120654119
Publisher: SPIE
Year: 2008
Weight: 498 KB
Volume: 6984
Category: Article
DOI: 10.1117/12.792376

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